Micro-electro-mechanical systems (MEMS) technology, which initially stems from semiconductor micro-fabrication, enables the creation of micro-optical elements, such as MEMS scanners. Made from silicon material, which has good electrical and mechanical properties, Korea Optron Corporation (KOC) MEMS scanners feature a reflective mirror, torsional springs, and electrical paths. The mirror redirects incident beam toward specific direction where users want to scan the target object. The incident beam is usually laser, but other kinds of light sources can also be used.
The torsional springs, which connect the mirror with frame anchors, makes the mirror to rotate at specific angles. For two-axis scanner, the mirror can rotate in two dimensional ways around torsional springs, which are placed in orthogonal direction on each axis. The electrical signal is the main source that generates forces to rotate themirror.
Packaged MEMS Scanner
• Anti-Reflection (AR) Coated High Efficiency Windows
• MEMS scanner chip
• Leadless Chip Carrier (LCC)
|unit||Type 1||Type 2
(W x H)
|mm||5 x 5||8 x 8||6 x 6|
|2||Mirror size||mm||1||3||2.3 x 3|
|Max. 100 Hz
|Max. 100 Hz
|5||Optical scan angle|
|Fast-axis||deg.||≥ ±12||≥ ±5||≥ ±5|
|Slow-axis||deg.||≥ ±4||≥ ±5||≥ ±5|
MEMS Scanner application
Optical micro scanners are widely used in various applications, such as optical communications, miniaturized projection displays, and biomedical imaging. Of the various actuation mechanisms, electrostatic comb-drive mirror scanners are advantageous because of their fast response, low power consumption, small footprint, and simple fabrication compared to electromagnetic, electro thermal and piezoelectric actuators.
• Finger vein identification
Finger veins are a promising biometric pattern for personalized identification in terms of their advantages over existing biometrics. simple fabrication compared to electromagnetic, electro thermal and piezoelectric actuators. We obtain high-resolution finger-vein images in transmission mode using the mirror scanner and a near infrared (NIR) laser, which will possibly improve live finger identification
• LCD panel inspection
Development of 3D-OCT MEMS optical scanner for testing the micro-defects in display panel